ROTARY MICRO STAGES 회전 마이크로 스테이지 |
M3-RS-U Rotary Smart Stage Positioning Module M3-RS-U 로터리 스마트 스테이지 포지셔닝 모듈 |
New Scale rotary micro stages and positioning modules feature our patented piezoelectric motors along with integrated position sensors, bearings, drive electronics and embedded firmware. These “smart stages” have all electronics integrated into the compact rotary micro stage – no external controller required. Along with smallest system size, this makes for fastest, easiest integration into your handheld and portable systems. New Scale 회전식 마이크로 스테이지 및 포지셔닝 모듈에는 특허받은 압전 모터와 통합 위치 센서, 베어링, 드라이브 전자 장치 및 내장 펌웨어가 탑재되어 있다. 이러한 "스마트 스테이지"는 소형 로터리 마이크로 스테이지에 모든 전자 장치가 통합되어 있어 외부 컨트롤러가 필요하지 않다. 가장 작은 시스템 크기와 함께 휴대용 시스템과 가장 빠르고 쉽게 통합할 수 있다. |
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M3-RS-U Rotary Smart Stage: Rotary micro stage with built-in closed-loop controller is the easy, all-in-on solution for embedded micro motion.
Beam steering and mirror positioning applications requiring precise, point-to-point positioning or dynamic scanning up to 100 Hz.
Medical
Industrial
Telecommunications
Aerospace and Defense
The M3-RS-U-360 Rotary Smart Stage offers precise, point-to-point positioning or dynamic scanning up to 100 Hz.The rotary microstage in this kit offers continuous 360 degree rotation at up to 1100 degrees per second with accuracy of 0.25 degrees.
Developer’s kit: Rotary Microstage
M3-RS-U Rotary Smart Stages are ideal for beam steering and mirror positioning applications requiring precise, point-to-point positioning or dynamic scanning up to 100 Hz. These beam steering developer’s kits include mounted aluminum-coated mirrors with limit stops, for motion of +/- 20 degrees at up to 1100 degrees per second with accuracy of 0.25 degrees
Developer’s kit: Single-axis mirror positioning system
Developer’s kit: Two-axis, two-mirror beam steering system
Each stage in the kit includes an attached flexible printed circuit (FPC) cable. You may purchase cables in other lengths, with straight or 90-degree exit angles. Beam steering kits include a mounted mirror, pre-attached to each stage. You may order additional mounted mirrors if desired. Tools to attach the mounted mirrors to the stage are included in the kit.
Model | Description |
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M3-RS-U-360 | Rotary Microstage Positioning Module |
M3-RS-U-Mirror-01-03 | Mounted mirror, 3 x 5 x 0.4 mm Inertia 0.50 g-mm² Standard mirror, one included with one-axis or two-axis kit |
M3-RS-U-Mirror-01-11 | Mounted mirror, 11 x 5 x 0.4 mm Inertia 0.60 g-mm² Standard mirror, one included with two-axis kit only |
M3-RS-U-FPC-0-150 | FPC cable with straight exit from stage 150 mm length (standard cable, one included with stage) |
The M3-RS-U Rotary Smart Stage Positioning Module is also available separately, without mirror or accessories. The micro stage has a continuous 360° rotation without the mirror mount limit stops used in the Beam Steering Developer’s Kits.
At only 12 mm in diameter including the embedded controller, this micro stage is ideal for scientific and industrial applications requiring precise rotational positioning in a limited space. Applications include optical tuning with gratings or filters, and sample alignment.
Contact New Scale for volume pricing.
Beam diameter (max) | 2 mm |
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Range of motion | +/- 20 degrees (continuous 360 degree motion without mirror stops) |
Speed | >1100 deg/sec |
Acceleration | >1,000,000 deg/sec² (note 1) |
Stall torque (min) | 0.04 N-mm |
Holding torque (min) | 0.08 N-mm (zero power) |
Recommended maximum payload mounted to rotating shaft (payload must be balanced) | |
Mass | 3 g |
Inertia | 350 g-mm² |
CLOSED-LOOP performance (with built-in position sensor) | |
Recommended step frequency | up to 100 Hz |
Resolution (encoder resolution) | 0.025 deg (440 µrad) absolute |
Repeatability | +/- 0.05 deg (880 µrad) |
Accuracy | 0.25 deg (4400 µrad) |
Maximum closed loop step & settle times (note 1) | 0.5 deg step: 9 ms 5 deg step: 14 ms 20 deg step: 21 ms |
OPEN-LOOP performance (external position sensor provided by user – see application note) | |
Resolution | <0.0057 deg (<100 µrad) |
Accuracy | Typically better than 10% of distance travelled after calibration |
Maximum open loop step times (note 1) | 0.05 deg step: 0.5 ms 0.5 deg step: 1.6 ms 5 deg step: 6 ms 20 deg step: 10 ms |
Input voltage | 3.3 VDC |
Power consumption (typical) input directly to stage | 500 mW active, moving 190 mW active, ready 50 mW standby |
Power consumption (typical) input via USB interface | BREAK-OUT BOARD (one-axis developer's kit) 675 mW active, moving 365 mW active, ready 150 mW standby – DEMO BOARD (two-axis developer's kit) 1200 mW active, both axes moving 580 mW active, ready 200 mW standby |
Stage mass | 3 g |
Operational lifetime | 100 million random positions |
Temperature and relative humidity | 0 to +60 °C, non-condensing |
Conformance | CE / RoHS |
Controller | Integrated into stage, 64 MIPS no external controller needed |
Communication interface | I²C, SPI, UART or analog servo Input directly to M3-RS |
Note 1: With 0.99 g-mm2 inertial load of standard mounted mirror M3-RS-U-Mirror-01-11
Internal Stage …..0.39 g-mm2
Mirror Clamp …… 0.45 g-mm2
Mirror ………… 0.15 g-mm2
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Total Inertia…… 0.99 g-mm2
Size – M3-RS-U-Mirror-01-03 (included in both dev kits) | 3 x 5 x 0.4 mm |
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Size – M3-RS-U-Mirror-01-11 (included in two-axis dev kit only) | 11 x 5 x 0.4 mm |
Material | float glass |
Coating | protected aluminum (MgF2) |
Operational bandwidth | 0.350 – 4.0 μm |
R(avg) reflectivity (0.350 – 4.0 μm) | 90% |
Max beam diameter | 2 mm |
Flatness (632 nm) | lambda/4 over any 2 mm length |
Surface quality | 60 – 40 scratch / dig |
CW damage threshold (4 μm) | 6 W/cm² |
Pulsed damage threshold (1 μsec pulses, 35 nm, 20 Hz) | 0.3 J/cm² |