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ROTARY MICRO STAGES
회전 마이크로 스테이지

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ROTARY MICRO STAGES
회전 마이크로 스테이지
M3-RS-U Rotary Smart Stage Positioning Module
M3-RS-U 로터리 스마트 스테이지 포지셔닝 모듈
New Scale rotary micro stages and positioning modules feature our patented piezoelectric motors along with integrated position sensors, bearings, drive electronics and embedded firmware.

These “smart stages” have all electronics integrated into the compact rotary micro stage – no external controller required. Along with smallest system size, this makes for fastest, easiest integration into your handheld and portable systems.

New Scale 회전식 마이크로 스테이지 및 포지셔닝 모듈에는 특허받은 압전 모터와 통합 위치 센서, 베어링, 드라이브 전자 장치 및 내장 펌웨어가 탑재되어 있다. 이러한 "스마트 스테이지"는 소형 로터리 마이크로 스테이지에 모든 전자 장치가 통합되어 있어 외부 컨트롤러가 필요하지 않다. 가장 작은 시스템 크기와 함께 휴대용 시스템과 가장 빠르고 쉽게 통합할 수 있다.
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ROTARY MICRO STAGES
회전 마이크로 스테이지
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ROTARY MICRO STAGE

High precision, smallest size and unmatched ease of use







M3-RS-U Rotary Smart Stage: Rotary micro stage with built-in closed-loop controller is the easy, all-in-on solution for embedded micro motion.

ADVANTAGES

  • Smallest size: < 12 mm diameter including controller
  • Closed-loop controller embedded in micro stage
     no separate controller needed
  • 3.3 VDC input
  • Direct input of motion commands (I2C, SPI, UART or analog servo)
  • Angular resolution 0.025 deg (440 µrad) closed loop
    – built-in absolute position sensor
  • Angular resolution 0.0057 deg (100 µrad) open loop
    with external position sensor provided by user
  • Absolute encoding and position feedback
  • Holds position with zero power and no jitter
  • Fast integration for embedded motion in smaller instruments

APPLICATIONS

Beam steering and mirror positioning applications requiring precise, point-to-point positioning or dynamic scanning up to 100 Hz.

Medical

  • Dermatology lasers
  • Fluorescence microscopes
  • 3D imaging instruments
  • In-vivo and in-vitro micro laser surgery

Industrial

  • 3D printers
  • LIDAR, 3D measurement, spectroscopy
  • Remote sensing (e.g. pollution sources)
  • Image and hand tremor stabilization
  • Laser marking, engraving, machining

Telecommunications

  • Free-space optical communication
  • Variable optical attenuation
  • Fiber-to-fiber optical switching

Aerospace and Defense

  • Target designation, jitter compensation
  • Automated obstacle detection, tracking and avoidance for robots, UAVs, etc.

DEVELOPER’S KITS

Developer’s Kits for Rotary Positioning

The M3-RS-U-360 Rotary Smart Stage offers precise, point-to-point positioning or dynamic scanning up to 100 Hz.The rotary microstage in this kit offers continuous 360 degree rotation at up to 1100 degrees per second with accuracy of 0.25 degrees.

DK-M3-RS-U-360

Developer’s kit: Rotary Microstage

  • One M3-RS-U-360 Rotary Smart Stage Positioning Module with embedded controller and straight FPC
  • Breakout board
  • USB adapter
  • New Scale Pathway™ Software




Video

Watch the video

All Developer’s Kits include New Scale Pathway™ software, a powerful development tool that lets you easily evaluate the micro stages and validate your embedded software.

Developer’s Kits for Beam Steering and Mirror Positioning

M3-RS-U Rotary Smart Stages are ideal for beam steering and mirror positioning applications requiring precise, point-to-point positioning or dynamic scanning up to 100 Hz. These beam steering developer’s kits include mounted aluminum-coated mirrors with limit stops, for motion of  +/- 20 degrees at up to 1100 degrees per second with accuracy of 0.25 degrees

DK-M3-RS-U-1M-20

Developer’s kit: Single-axis mirror positioning system

  • One M3-RS-U-360 Rotary Smart Stage Positioning Module with embedded controller and straight FPC
  • One M3-RS-U-Mirror-01-03, mounted to stage
  • Base
  • Breakout board for testing and USB connection
  • Cables and USB adaptor for PC control
  • New Scale Pathway™ Software

DK-M3-RS-U-2M-20-L

Developer’s kit: Two-axis, two-mirror beam steering system

  • Two M3-RS-U-360 Rotary Smart Stage Positioning Modules with embedded controllers and straight FPC
  • One M3-RS-U-Mirror-01-03, mounted to stage
  • One M3-RS-U-Mirror-01-11, mounted to stage
  • One 650nm collimated laser
  • Base
  • Demo board and cables for testing and USB connection
  • Power supply
  • New Scale Pathway™ Software

Optional Components for Developer’s Kits

Each stage in the kit includes an attached flexible printed circuit (FPC) cable. You may purchase cables in other lengths, with straight or 90-degree exit angles. Beam steering kits include a mounted mirror, pre-attached to each stage. You may order additional mounted mirrors if desired. Tools to attach the mounted mirrors to the stage are included in the kit.

ModelDescription
M3-RS-U-360Rotary Microstage Positioning Module
M3-RS-U-Mirror-01-03Mounted mirror, 3 x 5 x 0.4 mm
Inertia 0.50 g-mm²
Standard mirror, one included with one-axis or two-axis kit
M3-RS-U-Mirror-01-11Mounted mirror, 11 x 5 x 0.4 mm
Inertia 0.60 g-mm²
Standard mirror, one included with two-axis kit only
M3-RS-U-FPC-0-150FPC cable with straight exit from stage
150 mm length (standard cable, one included with stage)


M3-RS-U-360 ROTARY MICROSTAGE

The M3-RS-U Rotary Smart Stage Positioning Module is also available separately, without mirror or accessories. The micro stage has a continuous 360° rotation without the mirror mount limit stops used in the Beam Steering Developer’s Kits.

At only 12 mm in diameter including the embedded controller, this micro stage is ideal for scientific and industrial applications requiring precise rotational positioning in a limited space. Applications include optical tuning with gratings or filters, and sample alignment.

Contact New Scale for volume pricing.

 


SPECIFICATIONS

Performance for M3-RS-U Smart Stage with standard 3-mm long mounted mirror

Beam diameter (max) 2 mm
Range of motion+/- 20 degrees (continuous 360 degree motion without mirror stops)
Speed >1100 deg/sec
Acceleration>1,000,000 deg/sec² (note 1)
Stall torque (min)0.04 N-mm
Holding torque (min)0.08 N-mm (zero power)
Recommended maximum payload mounted to rotating shaft (payload must be balanced) 
Mass3 g
Inertia350 g-mm²
CLOSED-LOOP performance (with built-in position sensor)
Recommended step frequencyup to 100 Hz
Resolution (encoder resolution)0.025 deg (440 µrad) absolute
Repeatability+/- 0.05 deg (880 µrad)
Accuracy 0.25 deg (4400 µrad)
Maximum closed loop step & settle times (note 1) 0.5 deg step: 9 ms
5 deg step: 14 ms
20 deg step: 21 ms
OPEN-LOOP performance (external position sensor provided by user – see application note)
Resolution <0.0057 deg (<100 µrad)
AccuracyTypically better than 10% of distance travelled after calibration
Maximum open loop step times (note 1)0.05 deg step: 0.5 ms
0.5 deg step: 1.6 ms
5 deg step: 6 ms
20 deg step: 10 ms
Input voltage3.3 VDC
Power consumption (typical)
 input directly to stage
500 mW active, moving
190 mW active, ready
 50 mW standby
Power consumption (typical)
 input via USB interface
BREAK-OUT BOARD (one-axis developer's kit)
675 mW active, moving
365 mW active, ready
150 mW standby

DEMO BOARD (two-axis developer's kit)
1200 mW active, both axes moving
580 mW active, ready
200 mW standby
Stage mass 3 g
Operational lifetime 100 million random positions
Temperature and relative humidity 0 to +60 °C, non-condensing
Conformance CE / RoHS
ControllerIntegrated into stage, 64 MIPS
no external controller needed
Communication interfaceI²C, SPI, UART or analog servo
Input directly to M3-RS

Note 1:  With 0.99 g-mm2 inertial load of standard mounted mirror M3-RS-U-Mirror-01-11
Internal Stage …..0.39 g-mm2
Mirror Clamp …… 0.45 g-mm2
Mirror ………… 0.15 g-mm2
———————————–
Total Inertia…… 0.99 g-mm2

Standard Mirror (included in the Beam Steering Developer’s Kits)

Size – M3-RS-U-Mirror-01-03 (included in both dev kits)3 x 5 x 0.4 mm
Size – M3-RS-U-Mirror-01-11 (included in two-axis dev kit only)11 x 5 x 0.4 mm
Materialfloat glass
Coatingprotected aluminum (MgF2)
Operational bandwidth0.350 – 4.0 μm
R(avg) reflectivity (0.350 – 4.0 μm) 90%
Max beam diameter2 mm
Flatness (632 nm) lambda/4 over any 2 mm length
Surface quality 60 – 40 scratch / dig
CW damage threshold (4 μm)6 W/cm²
Pulsed damage threshold (1 μsec pulses, 35 nm, 20 Hz)0.3 J/cm²
 


     

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