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Tetra 100

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Tetra 100
Low Pressure Plasma Systems (Plasmacleaner)
The Tetra 100 plasma systems can be combined
in different variants in a modular manner.
Below, please find an overview over the most
common options using the Tetra 100 plasma systems.

Tetra 100 plasma systems are primarily used in the following sectors:

Analytics (SEM, TEM)
Archaeology
Automotive
Life sciences
Elastomer technology
Electrical engineering
Electron microscopy
Precision engineering
Research and development
Semiconductor technology
Small batch production
Plastics technology
Medical engineering
Micro-system technology
Solar cell technology
Textile technology
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Tetra 100

Low pressure plasma systems
for plasma cleaning, activation, etching and coating
Possibilities Of Plasma Treatment

Materials cleaning
Activation of materials
Etching materials
Coating of materials
Plasma technology offers
solutions for any type of contamination,
for any substrate and any post-treatment.
In the process, molecular contamination
residues are decomposed as well.
Good wettability is a prerequisite for
the adhesion of binding partners
in painting, gluing, printing or bonding.
Plasma technology allows for anisotropic
and isotropic etching. Isotropic etching
is done by chemical etching and
anisotropic etching by physical etching.
With low-pressure plasmas, components
can be tempered with various coats.
This is done by supplying gaseous
and liquid starting substances
into the vacuum chamber.






Technical data
Dimensions of Cabinet (19“ Rack)
(with connections)
Width approx. 600 mm (23.6“)
Height approx. 1700 - 2100 mm (66.9“ - 82.7“)
Depth approx. 800 mm (31.5“)
Weight approx. 200-300 kg (500 lbs) (without pump)

Vacuum Chambers
Stainless steel round, hinged door
Diameter approx. 400 mm (15.8“)
Length approx. 625 mm (24.6“)

Stainless steel rectangular, hinged door
Width approx. 400 mm (15.8“)
Height approx. 400 mm (15.8“)
Depth approx. 625 mm (24.6“)
Chamber volume
Approx. 80 - 100 l
Gas Connection
Mass Flow Controller (MFC)
Generator Frequency
80 kHz Power 1000 oder 3000 W
13,56 MHz Power 0 - 300 W; 0 - 600 W; 0 - 1000 W
2,45 GHz Power 0 - 1200 W
All generators are continuously adjustable
from 0 - 100%
Electrodes
Single or multiple levels
RIE electrodes with gas shower
Additional options
Spare parts kit, pressure gauge, corrosive gas design,
gas bottles, pressure reducer, heater plate, temperature
display, heatable chamber, Faraday cage, plasma
polymerisation accessories, test inks, oxygen generator,
slow ventilation, slow pump-off, TEM sample holder flange,
maintenance/service, documentation in local language,
installation on site incl. training.
Further options available on request.
Hardware Control
PCCE-control (Microsoft Windows CE)
PC-control (Microsoft Windows 10 IoT)
Pressure measurement
Pirani
Capacitance Manometer (for corrosive gas version)
Power supply
230 or 400 V / 3 Phases
Vacuum Pump
In different sizes and from various manufacturers
(as required with activated carbon filter)
Charge
Products carrier (optionally, water-cooled), quartz glass boats,
powder rotary drum, bulk goods rotary drum, aluminium panel,
stainless steel, borosilicate glass, quartz glass
Timer
integrated in the PC

Tetra 100 video

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배송 방법 : 택배
배송 지역 : 전국지역
배송 비용 : 2,500원
배송 기간 : 3일 ~ 7일
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