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Tetra 150

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Tetra 150
Low Pressure Plasma Systems (Plasmacleaner)
The Tetra 150 plasma systems can be
combined in different variants in a modular manner.
Below, please find an overview over the most
common options using the Tetra 150 plasma systems.

Tetra 150 plasma systems are primarily used in the following sectors:

Archaeology
Automotive
Life sciences
Elastomer technology
Electrical engineering
Electron microscopy
Precision engineering
Research and development
Semiconductor technology
Small batch production
Plastics Technology
Medical engineering
Micro-system technology
Solar cell technology
Textile technology
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Tetra 150

Low pressure plasma systems
for plasma cleaning, activation, etching and coating
Possibilities Of Plasma Treatment

Materials cleaning
Activation of materials
Etching materials
Coating of materials
Plasma technology offers
solutions for any type of contamination,
for any substrate and any post-treatment.
In the process, molecular contamination
residues are decomposed as well.
Good wettability is a prerequisite for
the adhesion of binding partners
in painting, gluing, printing or bonding.
Plasma technology allows for anisotropic
and isotropic etching. Isotropic etching
is done by chemical etching and
anisotropic etching by physical etching.
With low-pressure plasmas, components
can be tempered with various coats.
This is done by supplying gaseous
and liquid starting substances
into the vacuum chamber.






Technical data
Dimensions of Cabinet (19“ Rack) 
(with connections)
Width approx. 600 mm (23.6“)
Height approx. 2100 mm (82.6“)
Depth approx. 800 mm (31.5“)
Weight approx. 300 kg (600 lbs) (without pump)

Dimensions of Vacuum Chamber 
Stainless rectangular, hinged door
Width approx. 400 mm (15.8“)
Height approx. 600 mm (23.6“)
Depth approx. 625 mm (24.6“)

Aluminium rectangular
Width approx. 400 mm (15.8“)
Height approx. 600 mm (23.6“)
Depth approx. 625 mm (24.6“)
Chamber volume 
Approx. 150 l
Gas Connection 
Mass Flow Controller (MFC)
Generator Frequency 
80 kHz Power 1000 oder 3000 W
13,56 MHz Power 0 - 300 W; 0 - 600 W; 0 - 1000 W
2,45 GHz Power 0 - 1200 W
All generators are continuously adjustable
from 0 - 100%
Electrodes and Trays
Between one and ten trays / electrodes
Rotary drum is optionally available
Additional options
Spare parts kit, pressure gauge, corrosive gas design,
gas bottles, pressure reducer, heater plate, temperature
display, heatable chamber, Faraday cage, plasma polymerisation
accessories, test inks, oxygen generator, slow ventilation,
slow pump-off, TEM sample holder flange, maintenance/service,
documentation in local language, installation on site incl. training.
Further options available on request.
Hardware Control 
PCCE-control (Microsoft Windows CE)
PC-control (Microsoft Windows 10 IoT)
Pressure measurement 
Pirani
Capacitance Manometer (for corrosive gas version)
Power supply 
230 V or 400 V / 3 Phases
Vacuum Pump 
In different sizes and from various manufacturers
(as required with activated carbon filter)
Charge 
Products carrier (optionally, water-cooled), quartz glass boats,
powder rotary drum, bulk goods rotary drum, aluminium panel,
stainless steel, borosilicate glass, quartz glass
Timer
integrated in the PC

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배송 방법 : 택배
배송 지역 : 전국지역
배송 비용 : 2,500원
배송 기간 : 3일 ~ 7일
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